摘  要：磁控濺射鍍膜技術(shù)在薄膜制備領域廣泛應用，控制系統(tǒng)的設計對磁控濺射鍍膜設備的穩(wěn)定運行有著重要的影響。本文介紹了基于嵌入式一體化工控機和PLC的真空磁控濺射鍍膜設備電氣自動控制系統(tǒng)的硬件構(gòu)成、系統(tǒng)原理、系統(tǒng)功能以及設計思路及方法。并重點敘述了OMRON CJ系列PLC在控制系統(tǒng)中的應用。

關(guān)鍵詞：可編程控制器；工控機；磁控濺射

Design of Electrical Control System of the Vacuum Magnetron Sputtering Deposition 

on Industry control computer and PLC

    Abstrack:  The technology of Vacuum Magnetron Sputtering Deposition is wide used on the field of thin film manufacture. The design of Control system is very significant to MS system. The article intends to explain the electrical automatic control system of MS equipment on Industry control computer and PLC, including hardware structure, work theory, system function and the method of design. And the application of PLC to OMRON CJ1 series is described mostly in detail.

     Key Words:  PLC (Programmable logic Controller); Industry control computer; MS (Magnetron Sputtering);