摘 要
基于MEMS (Micro Electronic Mechanical System, 微電子機(jī)械系統(tǒng))慣性傳感器的慣性測量單元(Inertial Measurement Unit,IMU)以形狀尺寸小、壽命長、耐沖擊和可靠性高等特征，在航空航天、精密儀器儀表、生物醫(yī)療等領(lǐng)域有著廣闊的應(yīng)用潛力，并受到世界各國的高度重視，而且已經(jīng)被列為21世紀(jì)慣性技術(shù)的關(guān)鍵技術(shù)之一。本論文圍繞MEMS陀螺的測試、慣性測量單元的標(biāo)定和陀螺隨機(jī)模型的研究以及一種姿態(tài)測量系統(tǒng)進(jìn)行了研究。
隨著MEMS技術(shù)的不斷成熟，MEMS陀螺有替代中低精度的光纖陀螺的趨勢，論文中首先對STIM202陀螺進(jìn)行性能測試，主要包括比例因子、比例因子非線性、零偏、零偏穩(wěn)定性和零偏重復(fù)性。然后對基于高精度的STIM202陀螺的慣性測量單元進(jìn)行標(biāo)定，由于MEMS陀螺溫度效應(yīng)比較明顯，一種有效的溫度補(bǔ)償措施顯得尤為重要。本文給出了陀螺和加速度計的誤差模型，在-40℃～+70℃溫度區(qū)間內(nèi)，采用陀螺和加速度計同時標(biāo)定的方法對慣性測量單元標(biāo)定，在不失精度的情況下節(jié)省了大量的標(biāo)定時間，為批量化生產(chǎn)奠定基礎(chǔ)。
MEMS陀螺的隨機(jī)噪聲嚴(yán)重的影響了陀螺的精度，其噪聲項主要有：量化噪聲、角度隨機(jī)游走、偏值不穩(wěn)定性、速率隨機(jī)游走和速率斜坡。本文首先采用Allan方差法分析陀螺噪聲源，評估陀螺的性能，然后在建立時間序列模型的基礎(chǔ)上設(shè)計了卡爾曼濾波器，通過卡爾曼濾波驗證了采用此模型能夠較好的濾除噪聲，最后再通過Allan方差法分析濾波后的陀螺噪聲源。
在臔@凳笛櫓?，通过垂直陀螺?#65533;(Vertical Gyroscope,VG)與激光慣性組合導(dǎo)航系統(tǒng)的對比試驗，表明垂直陀螺儀可達(dá)到一定的精度，滿足了在中低精度領(lǐng)域的應(yīng)用。最后對全文的工作進(jìn)行了總結(jié)、并就今后的研究工作內(nèi)容作了展望。

關(guān)鍵詞：微機(jī)械；慣性測量單元；標(biāo)定；隨機(jī)模型；垂直陀螺儀










































Abstract
In aerospace, precision instruments, biology, medical care and other fields,the inertial measurement unit(IMU) based on MEMS(Micro Electronic Mechanical System) inertial sensor have broad application potential with the characteristics of small size,long service life,impact resistance and high reliability.Many countries pay high attention to it,and it is listed as one of the critical technologies of inertia in the 21st century.The research content are testing of MEMS gyro,calibration of the inertial measurement unit and research on gyro random model and a kind of attitude measuring system in this paper.
As MEMS technology continues to mature,MEMS gyro have the tendency to replace low or intermediate precision of fiber optic gyro.The performance of STIM202 gyro is firstly tested in this paper,the performance mainly include scaling factor, scaling factor nonlinear, zero drift,zero drift stability and zero drift repeatability.And then, the inertial measurement unit based on high precision STIM202 gyro is calibrated.A kind of effective temperature compensating measures significant particularly important,because of the temperature effect of MEMS gyro is quite obvious.The error model of gyro and accelerometer is defined in this paper,in the temperature range from -40℃to70℃,the calibration of gyro and accelerometer are done at the same time while calibrating the inertial measurement unit,the method can save a lot of time without losing the accuracy and make mass production to become possible.
The random noise of MEMS gyro seriously influence the gyro's accuracy,the main noise are quantization noise,angle random-walking,drift instability,rate random-walking and rate slope. Firstly,the noise source are analysised with the methods of Allan variance to eva luate the performance of the gyro, and then the kalman filter is designed based on the time series model established,and this model can effectively filter the noise through using the kalman filter, Finally,the filtered gyro noise source are analysised with the methods of Allan variance.
In the experiment of driving car,the contrast test of vertical gyroscope and laser inertial navigation system show that the vertical gyroscope can attain the certain accuracy and can meet the low precision areas of application.Finally,the full work of the paper is summarized and the future research content on this subject is made predicted.

Key words:MEMS;IMU;Calibration; Random Model ;VG
目 錄
摘 要 I
Abstract III
第1章 緒論 1
1.1 課題研究的背景和意義 1
1.2 慣性測量單元國內(nèi)外發(fā)展?fàn)顩r 5
1.3 本課題的主要研究內(nèi)容 8
第2章 MEMS慣性儀表及性能指標(biāo) 10
2.1 MEMS陀螺儀的分類及原理 10
2.1.1 MEMS陀螺儀的分類 10
2.1.2 MEMS陀螺儀的原理 11
2.1.3 MEMS陀螺儀的結(jié)構(gòu) 12
2.2 MEMS陀螺性能指標(biāo) 13
2.2.1 陀螺儀標(biāo)度因數(shù) 13
2.2.2 閾值和分辨率 14
2.2.3 最大輸入角速率 14
2.2.4 零偏 14
2.2.5 隨機(jī)游走系數(shù) 14
2.2.6 帶寬 14
2.2.7 STIM202陀螺儀 14
2.3 MEMS加速度計 15
2.3.1 微機(jī)械電容式加速度 15
2.3.2 MS8000系列加速度計 17
2.4 本章小結(jié) 18
第3章 MEMS陀螺的測試與慣性測量單元的標(biāo)定 19
3.1 MEMS陀螺主要性能指標(biāo)測試 19
3.1.1 MEMS陀螺標(biāo)度因數(shù)測試 19
3.1.2 MEMS陀螺標(biāo)度因數(shù)非線性測試 20
3.1.3 MEMS陀螺零偏測試 20
3.1.4 MEMS陀螺零偏穩(wěn)定性測試 21
3.1.5 MEMS陀螺零偏重復(fù)性測試 21
3.2 STIM202的..