淺議微機(jī)械元件和儀器新進(jìn)展


本文共計(jì)6頁，4395字；

New Progress of MEMS Component and Instrument
[Abstract]： MEMS component and Instrument are suitable for batch manufacture and have the advantage of low price, high reliability, smaller volume and large-scale integration. In this decade a great progress has been made in the research,development and marketing of this field, which suggests a bright future.
[關(guān)鍵詞]: 微機(jī)械元件,微機(jī)械儀器,多功能絕對(duì)壓力傳感器,醫(yī)用壓力傳感器,加速度傳感器,CMOS傳感器、微機(jī)械電泳儀、微機(jī)械質(zhì)譜儀、微機(jī)械細(xì)胞計(jì)、微機(jī)械染色體鏈成反應(yīng)儀、微機(jī)械重金屬探測(cè)儀、微機(jī)械血液測(cè)試儀。
[摘要] :微機(jī)械元件和微機(jī)械儀器，適于大批量生產(chǎn)，具有成本低廉、性能優(yōu)良和體積微小及集成度高的特點(diǎn)，近十年來，研制、開發(fā)及市場(chǎng)擴(kuò)大方面取得了巨大的進(jìn)展，展現(xiàn)了美好的前景。

目錄：
[正文]：
一、前言
二、微機(jī)械元件
（一） 微機(jī)械元件應(yīng)用
(二)、市場(chǎng)預(yù)測(cè)
三、微機(jī)械儀器
四、結(jié)論
部分參考文獻(xiàn)
1. J. Bryzek, Impact of MEMS technology on society, Sensors and Actuators A 56 (1996), 1~9
2. J. Bryzek, New generation of disposable blood pressure sensors, Proc. Sensors Expro, Detroit, MI, USA. 1987
3. J. Bryzek, etc., Silicon sensors and micro structures in health care industry, Proc. Sensors, Expro,
4. W. Kuchuel, A surface machined silicon accelerometer with on-chip detection circuitry, Sensory and Actuators, A, 45(1994),7-16
5. BIS Strategic Decision: Automotive components forecast II: Sensors market study, 1993.