國(guó)防上的穆爾法律：一個(gè)基于矽微型懸臂的智能傳感器平臺(tái)[外文翻譯]

摘要——急需為發(fā)展存在廉宜的,高度地選擇的,和極端地敏感的傳感器幫助打擊恐怖主義。如果這樣的傳感器可以被制造成極其小的規(guī)模，他們可能在實(shí)際上任何形勢(shì)里被部署?？植婪肿佑卸喾N潛在代理和交付，這樣意味著從中選擇化學(xué)，生物學(xué)，傳播學(xué)，或者爆炸攻擊。檢測(cè)恐怖分子武器已經(jīng)成為一項(xiàng)復(fù)雜和昂貴的努力，因?yàn)槟壳靶枰姸鄠鞲衅髌脚_(tái)去發(fā)現(xiàn)不同類型的威脅。能集中生產(chǎn)和有效部署出一種能查出一系列威脅的單一傳感器是贏得這場(chǎng)反恐怖主義戰(zhàn)爭(zhēng)的根本?；诠璧奈⑿碗娮討冶蹅鞲衅鞔砹艘环N能與恐怖主義作斗爭(zhēng)的理想的傳感器平臺(tái)，因?yàn)檫@些微型傳感器是廉價(jià)的并且可以被部署在任何地方。最近，這種高靈敏性的微型懸臂傳感器已經(jīng)被用在各種各樣的威脅的偵查中。因此， 這種要求為單一微型傳感器平臺(tái)的需求已經(jīng)被認(rèn)識(shí)，并且實(shí)現(xiàn)這種綜合、廣泛、可部署的微型傳感器是幾乎可能的。
關(guān)鍵詞——化學(xué)，生物學(xué)，傳播學(xué)，爆炸察覺，國(guó)防，微型懸臂，微型電子，懸臂傳感器，恐怖主義。
Abstract—An urgent need exists for the development of inex-
pensive, highly selective, and extremely sensitive sensors to help
combat terrorism. If such sensors can be made miniature, they
could be deployed in virtually any situation. Terrorists have a wide
variety of potential agents and delivery means to choose from for
chemical, biological, radiological, or explosive attacks. Detecting
terrorist weapons has become a complex and expensive endeavor,
because a multitude of sensor platforms is currently needed to de-
tect the various types of threats. The ability to mass produce and
cost effectively deploy a single type of sensor that can detect a wide
range of threats is essential in winning the war on terrorism. Sil-
icon-based microelectromechanical sensors (MEMS) represent an
ideal sensor platformfor combating terrorismbecause theseminia-
ture sensors are inexpensive and can be deployed almost anywhere.
Recently, the high sensitivity ofMEMS-based microcantilever sen-
sors has been demonstrated in the detection of a variety of threats.
Therefore, the critical requirements for a single, miniature sensor
platformhave beenmet and the realization of an integrated, widely
deployable MEMS sensor could be near.
Index Terms—Chemical, biological, radiological, or explosive
(CBRE) detection, homeland defense, microcantilever, microelec-
tromechanical sensors (MEMS) sensor, terrorism.