基于OpenGL的真空機器人三維圖形仿真{外文翻譯}

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中文： 3260 字
英文： 10455 字符

摘要：真空機器人是先進半導體制造行業(yè)中不可缺少的重要設(shè)備之一，本文介紹了一種并聯(lián)型真空機器人的運動學模型，以及利用OpenGL和STL格式文件在Visual c++ 6.0程序界面中實現(xiàn)3D圖形仿真的方法，取得了良好的實驗效果，為進一步實現(xiàn)上位機實時在線監(jiān)控奠定了基礎(chǔ)。
關(guān)鍵詞：真空機器人；并聯(lián)機器人；OpenGL；STL；Visual C++ 6.0
1 引言
隨著半導體制造技術(shù)的進步，集成電路的集成度不斷提高，半導體器件的加工必須在高度潔凈的環(huán)境中進行，利用小型真空室可滿足這一要求。為了保持真空室的潔凈度，需要采用機器人代替人工操作。如果將機器人、晶圓盒與所有制程機臺集中合并為一臺生產(chǎn)設(shè)備，不僅減小了占地面積．且縮短了工藝流程，進一步提高了產(chǎn)率與產(chǎn)品質(zhì)量。這種設(shè)備稱為集束型制程設(shè)備(Cluster Tools)。所謂真空機器人就是在集束型制程設(shè)備的各個制程機臺之間，對半導體材料進行取出、搬運和裝入等操作的機械裝置。由于無法直接觀察密閉真空腔室中的機器人動作，必須在上位機監(jiān)控界面中實時再現(xiàn)其運行狀態(tài)。因此需要對機器人進行3D仿真建模。
常壓環(huán)境下的工業(yè)機器人以多自由度串聯(lián)型為主．轉(zhuǎn)動軸數(shù)目與部件數(shù)目基本一致。按照一般的建模方法．首先通過矩陣乘法求出各部件的轉(zhuǎn)動軸坐標系相對于固定坐標系的變換 ......



Implementation of3D graphical simulation for vacuumrobotbased on Open GL

Abstract: Vacuum robot is an essential device in advanced semiconductor manufacturing. This paper introduces the kinematic modeling of a kind of parallel vacuum robot and the implementation of 3D graphical simulation based on OpenGL and STL files in Visual C++ program interface, which also lays the foundation of real-time online monitoring of the robot.
Key word: vacuum robot, parallel robot, OpenGL, STL, Visual C++ 6.0
Sort number of Chinese Library: TP391.9 Literature identification code: B
1 Introduction
With the improvement of semiconductor manufacturing，the requirement for high integration of IC circuit is increasing，so it is necessary to process semiconductor components in a highly Clean environment，which can be offered by miniature vacuum room．To maintain the cleanness，manual work has to be replaced by robots．Cluster tool，namely the equipment combined by robot，vacuum Chamber，wafer cassettes and process modules，has the virtue of reducing space，curtailing manufacturing progress，and improving efficiency and．quality．Vacuum robot，as it is，the mechanical device to pick，move and place semiconductor wafers among process modules of the cluster tool, Because the movement of robot in the sealed vacuum chamber cannot be directly observed，its operation has to be displayed real-timely on the monitor of cluster tool controller．Therefor6 it is necessary to implement the 3D graphical simulation for the robot ......